Technical Benefits of this HENZE Boron Nitride Solution:
Insulating shrouds and strips made from HeBoSint®, HENZE´s sintered Boron Nitride
- possess
unsurpassed
resistance to thermal shock - provide
excellent
dielectric strength at high temperatures - contain no harmful elements that might evaporate
- can be easily cleaned by mild sand blasting
- have an extended life time
HENZE offers:
- a well-tried range of HeBoSint® Boron Nitride materials for all variants of PVD-ARC systems
- expert advice as to the use of HeBoSint® and HeBoCoat® in PVD and plasma systems
- high precision manufacturing of insulating components in our Kempten machining centre – exactly to your specifications and in any quantity ranging from prototypes to high volume requirements
- just-in-time delivery thanks to 100% in-house production and stock control
- possibility
of a
research and development partnership for innovative solutions
PVD-ARC-Systems need reliable Shielding from uncontrolled Electron Beams
Insulating shrouds must possess high dielectric strength
In PVD systems a particular solid material – the so called target – is vaporised and then deposited by condensation onto a substrate. This can be achieved by several methodologies. In the ARC process the target is vaporised by means of a high energy voltaic arc. Since this electron beam is unguided, insulating shrouds and other shielding components are required to keep it on target and prevent equipment damage.
A further area that needs to be addressed with all PVD and plasma systems is unwanted metal deposition on the walls and on other components of the vacuum chamber.
HeBoSint® has become the industry standard
Insulating shrouds and strips made from HeBoSint®, HENZE´s sintered Boron Nitride, reliably constrain the voltaic arc within the necessary limits. This high temperature ceramic material is to be found in nearly all PVD-ARC units the world over.
Owing to its durability, which is superior to that of glass bonded mica, HeBoSint® is also becoming the material of choice for sub frames in PVD systems.
Download: Technical Information Boron Nitride vs. Glass Bonded Mica in PVD applications
In all plasma and PVD systems unwanted metal deposits can be easily removed from surfaces which have been previously treated with HeBoCoat® liquids.
Find a technical solution
in the area of PVD or plasma
surface technology!
Please
contact us.
